PZT thin film bulk acoustic wave resonators and filters
- Kirby, P.B.
- Su, Q.X.
- Komuro, E.
- Zhang, Q.
- Imura, M.
- Whatmore, R.W.
Revue:
Proceedings of the Annual IEEE International Frequency Control Symposium
ISSN: 0161-6404
Année de publication: 2001
Pages: 687-694
Type: Article