A MEMS capacitor with improved RF power handling capability
- Girbau, D.
- Otegi, N.
- Pradell, L.
- Lázaro, A.
Actes de conférence:
GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium
ISBN: 9788890201202
Année de publication: 2005
Volumen: 2005
Pages: 501-504
Type: Communication dans un congrès