LENS (lithography enhancement toward nano scale): A European project to support double exposure and double patterning technology development

1. Cantu, P.
2. Baldi, L.
3. Piacentini, P.
4. Sytsma, J.
5. Le Gratiet, B.
6. Gaugiran, S.
7. Wong, P.
8. Miyashita, H.
9. Atzei, L.R.
10. Buch, X.
11. Verkleij, D.
12. Toublan, O.
13. Perez-Murano, F.
14. Mecerreyes, D.