Deposition of Ti-Zr-O-N films by reactive magnetron sputtering of Zr target with Ti ribbons
- da Silva Oliveira, C.I.
- Martínez-Martínez, D.
- Cunha, L.
- Lanceros-Mendez, S.
- Martins, P.
- Alves, E.
- Barradas, N.P.
- Apreutesei, M.
Revue:
Surface and Coatings Technology
ISSN: 0257-8972
Année de publication: 2021
Volumen: 409
Type: Article