Sensors based on thin film bulk acoustic wave resonators: From fabrication to applications in chemical and biological analysis

1. Demiquel-Ramos, M.
2. Rughoobur, G.
3. Rajabalina, N.
4. Hamzehlou, S.
5. Escolano, J.M.
6. Iborra, E.
7. Flewitt, A.J.