Integrated SMA-based NEMS actuator for optical switching

  1. Lambrecht, F.
  2. Aseguinolaza, I.
  3. Chernenko, V.
  4. Kohl, M.
Actas:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781509019731

Ano de publicación: 2016

Volume: 2016-February

Páxinas: 79-82

Tipo: Achega congreso

DOI: 10.1109/MEMSYS.2016.7421562 GOOGLE SCHOLAR
Fonte de datos: Scopus